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FC_Single/_Params/KIMM.Log.Param

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<Array>
<Name>Param.Log</Name>
<Dimsize>23</Dimsize>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Flow] MFC - AN.H2</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.0</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Flow] MFC - AN.N2</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.2</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Flow] MFC - AN(NH3).HN3</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.1</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Flow] MFC - AN(NH3).N2</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.2</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Flow] MFC - CA.AIr</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.4</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Flow] MFC - CA.N2</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.3</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] Bottle - AN</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] Bottle - AN(NH3)</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.1</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] Bottle - CA</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.2</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] PreHeater - AN</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.3</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] PreHeater - AN(NH3)</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.4</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] PreHeater - CA</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.5</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] Cell</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.6</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] AN Outlet</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>1.0</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] CA Outlet</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>1.1</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] AN GAS</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.5</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] AN(NH3) GAS</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.6</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] CA GAS</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.7</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] AN Inlet</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>1.0.0</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] AN Outlet</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>1.0.3</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] AN(NH3) Inlet</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>1.0.1</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] CA Inlet</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>1.0.2</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] CA Outlet</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>1.0.4</Val>
</String>
</Cluster>
</Array>
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