FC_Single/_Params/웰덱스.Log.Param

<Array>
<Name>Param.Log</Name>
<Dimsize>11</Dimsize>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Flow] MFC - AN.H2 / N2</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.0</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Flow] MFC - CA.Air / N2</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.1</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] Bottle - AN.Wet</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] Bottle - CA.Wet</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.1</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] PreHeater - AN</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.2</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] PreHeater - CA</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.3</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Temp] Cell</Val>
</String>
<String>
<Name>Type</Name>
<Val>TEMP (PV)</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.4</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] AN Inlet</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.2</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] AN Outlet</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.4</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] CA Inlet</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.3</Val>
</String>
</Cluster>
<Cluster>
<Name>Log Info.</Name>
<NumElts>3</NumElts>
<String>
<Name>Name</Name>
<Val>[Pressure] CA Outlet</Val>
</String>
<String>
<Name>Type</Name>
<Val>AI</Val>
</String>
<String>
<Name>Port</Name>
<Val>0.0.5</Val>
</String>
</Cluster>
</Array>